RADIANT BURNER FOR INCINERATION OF CONTAMINATED GAS
    3.
    发明申请
    RADIANT BURNER FOR INCINERATION OF CONTAMINATED GAS 审中-公开
    用于焚烧污染气体的放射性燃烧器

    公开(公告)号:WO2016156811A1

    公开(公告)日:2016-10-06

    申请号:PCT/GB2016/050826

    申请日:2016-03-23

    Abstract: A radiant burner and method are disclosed. The radiant burner is for treating an effluent gas stream from a manufacturing processing tool and comprises: a plurality of treatment chambers, each treatment chamber having an effluent stream inlet for supplying a respective portion of said effluent gas stream to that treatment chamber for treatment therewithin. In this way, multiple treatment chambers may be provided, each of which treats part of the effluent stream. Accordingly, the number of treatment chambers can be selected to match the flow rate of the effluent gas stream from any particular processing tool. This provides an architecture which is reliably scalable to suit the needs of any effluent gas stream flow rate.

    Abstract translation: 公开了一种辐射燃烧器和方法。 辐射燃烧器用于处理来自制造加工工具的流出气流,包括:多个处理室,每个处理室具有流出物流入口,用于将所述流出气体流的相应部分供应到该处理室以用于其处理。 以这种方式,可以提供多个处理室,每个处理室处理部分流出物流。 因此,可以选择处理室的数量以匹配来自任何特定加工工具的流出气流的流量。 这提供了可靠地可扩展以适应任何流出气流流量的需要的架构。

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