摘要:
본 발명은 차압센서에 관한 것이다. 본 발명에 따른 차압센서는 몸체와 커버를 포함하며, 그 내부에 서로 분리된 제1챔버, 제2챔버 및 제3챔버를 구비하는 하우징과, 상기 제1챔버와 연통된 제1압력채널 및 상기 제2챔버와 연통되며, 상기 제1압력채널에 유입되는 가스에 비해서 압력이 높은 가스가 유입되는 제2압력채널과, 상기 제2챔버 및 제3챔버와 면하는 제1면과 그 제1면과 나란하며 상기 제1챔버와 면하는 제2면을 구비하며, 상기 제1면 중 상기 제3챔버와 면하는 부분에 전자부품이 설치되고, 단자가 형성된 기판과, 상기 기판의 제2면에 설치되어, 상기 제1챔버의 내부에 배치되며, 상기 제1챔버와 제2챔버의 압력 차이에 따른 전기신호를 발생시키는 센서소자와, 상기 하우징에 설치되고, 그 일단이 상기 제3챔버 내부로 연장되며, 상기 센서소자의 전기신호를 외부 장치에 전달하도록 구성된 리드 프레임과, 상기 센서소자의 전기신호를 상기 리드 프레임에 전달하기 위해, 상기 기판의 단자와 상기 리드 프레임을 제3챔버 내에서 연결하는 도선과, 상기 몸체와 커버가 접하는 영역에 배치되어, 상기 제2챔버와 제3챔버를 외부에 대해서 밀봉하는 제1밀봉부와, 상기 기판과 상기 몸체가 접하는 영역에 배치되어, 상기 제1챔버를 상기 제2챔버에 대해서 밀봉하는 제2밀봉부와, 상기 제3챔버를 상기 제2챔버에 대해서 밀봉하는 제3밀봉부를 포함한다.
摘要:
A pressure sensor assembly for measuring the pressure of a first fluid. The assembly having a first housing including a pressure sensing device arranged therein. A diaphragm is arranged on a surface of the first housing and is configured to transmit a force exerted on a first side thereof to the pressure sensing device. A second housing is provided and attached to the first housing. The second housing may be arranged generally circumferentially around the diaphragm. A compressible element is provided and arranged within a compressible element space defined within the second housing. The compressible element is configured to transmit a force exerted thereon by the fluid to the first side of the diaphragm.
摘要:
Apparatus and associated methods relate to a force sensor having flip-chip mounted force-sensing die having a force-sensing element fabricated on an unflipped top surface and an unflipped back surface being thinned so as to create a flexible diaphragm responsive to an externally applied force, wherein, when the force-sensing die is flipped and mounted, a predetermined space remains between the top surface of the force-sensing die and the mounting substrate it faces, the substrate presenting a deflection limitation for the deformation of the flexible membrane during a force event. In an illustrative embodiment, the force sensor may have a mechanical stop to precisely establish a predetermined deflection limitation. In some embodiments, the predetermined deflection limitation may advantageously limit the deflection of the flexible membrane so as not to deflect beyond a breaking point.
摘要:
Eine Sensoreinheit mit einer Messzelle (1) mit mindestens abschnittsweiser wärmeleitender Oberfläche, einem Gehäuse (3; 4, 5, 6, 7), in der die Messzelle (1) grösstenteils enthalten ist, und mindestens einem Zugangskanal (2) zur Messzelle (1). Die Sensoreinheit zeichnet sich durch einen Hohlraum (8) aus, der grösstenteils durch eine äussere Oberfläche der Messzelle (1) und durch eine zur Oberfläche der Messzelle (1) gerichteten Wand des Gehäuses (3; 4, 5, 6, 7) begrenzt ist, wobei der Hohlraum (8) in sich geschlossen ist.
摘要:
Die Erfindung betrifft einen Druckmessumformer (1) mit zumindest einer Kammer (4, 5), welche zur Übertragung eines zu messenden Drucks von einer Trennmembran (9, 10) zu einem druckempfindlichen Sensor (6) mit einer Druckübertragungsflüssigkeit befüllt ist. Zur Verbesserung der Langzeitstabilität ist die zumindest eine Kammer (4, 5) mit einem Molekularsieb (16, 18) versehen, welches ein gutes Adsorptionsvermögen für verunreinigende Stoffe in der Druckübertragungsflüssigkeit besitzt. Damit kann der Druckübertragungsflüssigkeit beispielsweise Wasser entzogen werden, welches bereits bei der Befüllung der Kammer (4, 5) in der Flüssigkeit enthalten war oder im Betrieb des Druckmessumformers (1) beispielsweise durch Diffusion in die Kammer (4, 5) eingedrungen ist.
摘要:
Der Erfindung liegt die Aufgabe zugrunde, eine Prozessgasanlage mit einem Sensor zur Erfassung einer Messgröße eines Prozessgases bereitzustellen, die eine zuverlässige Funktion gewährleistet. Es wird eine Prozessgasanlage, vorzugsweise ausgebildet als eine Gasversorgungsanordnung einer Brennstoff Zellenvorrichtung, mit einem Sensor (1) zur Erfassung einer Messgröße eines Prozessgases vorgeschlagen, wobei der Sensor ein Sensorgehäuse umfasst, welches einen Gasanschlusskanal (6) mit einer gasseitigen Öffnung (7) zur Zuleitung des Prozessgases an einen Messgrößenaufnehmer aufweist, wobei der Gasanschlusskanal (6) und/oder der Messgrößenaufnehmer eine Oberfläche aufweisen/aufweist, die mit einer hydrophilen (8) und/oder einer hydrophoben Schicht (9) versehen ist.
摘要:
A transducer packaging assembly (10) for use in a sensing unit subjected to high forces of acceleration includes a base (12) having a cavity (24). A pressure sensitive semiconductor die (16) is bonded to a large backplate (14) having a shape so that it nestles into cavity (24) but is spaced from the surface of cavity (24). A planar cover secured to base (12) has a hole (54) larger than die (16) but smaller than backplate (14) and thin wires (58) extend from die (16) to electrical connections (60) on cover (18). A viscous fluid (70) fills a space between backplate (14) and cavity (24) and a space between backplate (14) and cover (18) and transmits a pressure to be measured to pressure sensitive die (16). Viscous fluid (70) has a sufficiently high viscosity to oppose movement of backplate (14) relative to cavity (24) while cushioning pressure sensitive die (16) and backplate (14) from forces of acceleration.
摘要:
A pressure sensor is provided with a compressible insert that is disposed within an internal opening of a potentially frangible component, such as a tubular glass member. If a condensate forms within the internal opening of the tubular glass member, freezing of the condensate can cause it to expand and damage the glass member. The compressible insert absorbs the expansion of the liquid condensate by compressing, and prevents the expanding condensate from cracking the tubular glass member. The compressible insert, in a particularly preferred embodiment of this invention, has an opening extending therethrough to facilitate the transmission of pressure throughout the aligned openings of the pressure sensor. In one particular embodiment, a silicone die is etched to provide a cavity and corresponding diaphragm portion on which piezoresistive elements are disposed. The silicon pressure die is attached, by anodic bonding, to the tubular glass member and the tubular glass member is, in turn, attached to a tubular support member. The tubular support member can be attached to a metallic conduit structure to facilitate connection of the pressure sensor to a tube or hose.