公开(公告)号：WO2009002411A8

公开(公告)日：2010-02-25

申请号：PCT/US2008007472

申请日：2008-06-16

Applicant: LUCENT TECHNOLOGIES INC ,  AKSYUK VLADIMIR ANATOLYEVICH ,  BOLLE CRISTIAN A ,  JONES CHRISTOPHER D W ,  PARDO FLAVIO ,  RYF ROLAND ,  SIMON MARIA ELINA

Inventor： AKSYUK VLADIMIR ANATOLYEVICH ,  BOLLE CRISTIAN A ,  JONES CHRISTOPHER D W ,  PARDO FLAVIO ,  RYF ROLAND ,  SIMON MARIA ELINA

IPC: G01J5/40

CPC classification number: G01J5/08 ,  G01J5/02 ,  G01J5/0205 ,  G01J5/023 ,  G01J5/0806 ,  G01J5/0825 ,  G01J5/0831 ,  G01J5/40 ,  G01J2005/0077

Abstract: A representative embodiment of the invention provides an infrared (IR) imaging system (300) adapted to (i) convert an IR image of an object into mechanical displacements of a plurality of movable plates (304,306), (ii) use the mechanical displacements to impart a corresponding spatial phase modulation pattern onto a beam of visible light, and (iii) apply spatial filtering to convert the spatial phase modulation pattern into a visible image of the object.

Abstract translation: 本发明的代表性实施例提供了一种适于（i）将物体的IR图像转换成多个可移动板（304,306）的机械位移的红外（IR）成像系统（300），（ii）使用机械位移 将相应的空间相位调制图案赋予可见光束，并且（iii）应用空间滤波以将空间相位调制图案转换成物体的可见图像。

公开(公告)号：WO2002043148A3

公开(公告)日：2002-05-30

申请号：PCT/US2001/043555

申请日：2001-11-20

Applicant: CARNEGIE MELLON UNIVERSITY

Inventor： FEDDER, Gary, K. ,  LAKDAWALA, Hasnain

IPC: G01J5/40

Abstract: An infrared (IR) sensitive pixel (20) and an IR imager (100) including the same. According to one embodiment, the pixel includes a substrate assembly (24) having a cavity (26) defined by at least one sidewall (33) and a cantilevered beam (22) connected to the substrate assembly and disposed in the cavity. The cantilevered beam includes a first spring portion (28) and a first capacitor plate portion (30), wherein the first spring portion includes at least two materials having different coefficients of thermal expansion. The pixel further includes a second capacitor plate portion (30, 34), such that incident IR radiation causes the first spring portion of the cantilevered beam to move laterally relative to the sidewall, thereby creating a variable capacitance between the first capacitor plate portion of the cantilevered beam and the second capacitor plate portion.

公开(公告)号：WO00054030A2

公开(公告)日：2000-09-14

申请号：PCT/US2000/006075

申请日：2000-03-09

IPC: G01J3/36 ,  G01J5/40 ,  G01J5/60 ,  G01N21/17 ,  G01N21/00

CPC classification number: G01J3/36 ,  G01J3/0259 ,  G01J5/40 ,  G01J5/601 ,  G01N21/171

Abstract: A micro-instrument for detecting a chemical is formed on a coin-sized semiconductor substrate. A waveguide is formed by a semiconductor layer disposed on the substrate. The waveguide semiconductor layer has a groove forming an entrance aperture for receiving polychromatic radiation. An infrared emitter is disposed in the groove for generating the polychromatic radiation. An array of micro-mechanical thermal detectors can be formed integrally with the substrate. Each of the thermal dectectors has a measurable characteristic physical parameter and each of the thermal detectors has a coating exhibiting a preferential adsorption of at least one chemical to be sensed. A self focusing reflection grating is formed integrally with the waveguide semiconductor layer for directing a monochromatic spectrum onto the array responsive to the polychromatic radiation, such that each of the thermal detectors receives different wavelengths of the monochromatic spectrum.

Abstract translation: 在硬币尺寸的半导体衬底上形成用于检测化学品的微型仪器。 波导由设置在基板上的半导体层形成。 波导半导体层具有形成用于接收多色辐射的入口孔的凹槽。 红外发射器设置在凹槽中用于产生多色辐射。 微机械热检测器的阵列可与衬底一体地形成。 每个热检测器具有可测量的特征物理参数，并且每个热检测器具有表现出至少一种要被感测的化学物质的优先吸附的涂层。 自聚焦反射光栅与波导半导体层一体地形成，以响应于多色辐射将单色光谱引导到阵列上，使得每个热检测器接收不同波长的单色光谱。

公开(公告)号：WO2007137995B1

公开(公告)日：2008-03-20

申请号：PCT/EP2007055068

申请日：2007-05-24

Applicant: UNIV LIEGE ,  FLEURY-FRENETTE KARL ,  HABRAKEN SERGE ,  RENOTTE YVON ,  HASTANIN JURIY

Inventor： FLEURY-FRENETTE KARL ,  HABRAKEN SERGE ,  RENOTTE YVON ,  HASTANIN JURIY

IPC: G01J5/58 ,  G01J5/40

CPC classification number: G01J5/58 ,  G01J5/40

Abstract: A first object of the invention is a radiation detector comprising an energy absorber (203), for absorbing incident radiation (RAD) and thus undergoing a temperature increase; and optical readout means, for detecting said temperature increase; wherein said optical readout means comprises input coupling means (202) for coupling a light beam (2011) to said energy absorber (203) by exciting surface plasmons resonance, a surface plasmons resonance condition being dependent on the energy absorber (203) temperature, and wherein said energy absorber (203) is separated from said input coupling means (202) by a dielectric layer (2032). A second object of the invention is a micromechanical sensor comprising: a micromechanical oscillator and optical readout means (202) for detecting a displacement of said micromechanical oscillator; wherein said optical readout means comprise input coupling means (202) for coupling a light beam (2011) to a conductive surface (2031) by exciting surface plasmons resonance, a surface plasmons resonance condition being dependent on the displacement of said micromechanical oscillator.

Abstract translation: 本发明的第一个目的是一种辐射探测器，其包括用于吸收入射辐射（RAD）并因此经历温度增加的能量吸收器（203） 和光学读出装置，用于检测所述温度升高; 其中所述光学读出装置包括用于通过激励表面等离子体激元共振（表面等离子体激元共振条件取决于能量吸收器（203）温度）将光束（2011）耦合到所述能量吸收器（203）的输入耦合装置（202） 其中所述能量吸收器（203）通过介电层（2032）与所述输入耦合装置（202）分离。 本发明的第二个目的是一种微机械传感器，包括：微机械振荡器和光学读出装置（202），用于检测所述微机械振荡器的位移; 其中所述光学读出装置包括用于通过激励表面等离子体激元共振而将光束（2011）耦合到导电表面（2031）的输入耦合装置（202），表面等离子体激元共振条件取决于所述微机械振荡器的位移。

公开(公告)号：WO02021086A1

公开(公告)日：2002-03-14

申请号：PCT/JP2001/007608

申请日：2001-09-03

IPC: G01J1/02 ,  B81B3/00 ,  G01J5/40 ,  G01J5/48 ,  H01L27/148

CPC classification number: B81B3/0081 ,  B81B2201/0278 ,  B81B2201/042 ,  B81B2203/0109 ,  G01J5/40 ,  H01L27/14812 ,  H01L27/14818 ,  H01L27/14875

Abstract: A thermal displacement element, comprising a base and a supported part supported on the base, the supported part further comprising first and second displacement parts, a thermal separation part with high thermal resistance, and a radiation absorbing part receiving a radiation and converting the radiation into a heat, the first and second displacement parts each further comprising at least two layers of different types of substances with different coefficients of expansion overlapped with each other, wherein the first displacement part is mechanically continued to the base without passing the thermal separation part, the radiation absorbing part and the second displacement part is mechanically continued to the base through the thermal separation part and the first displacement part, the second displacement part is thermally connected to the radiation absorbing part, and a thermal radiation detector comprises the thermal displacement element and a displacement reading member fixed to the second displacement part of the thermal displacement element and used to obtain a specified variation produced in the second displacement part.

Abstract translation: 一种热位移元件，包括基座和支撑在基座上的支撑部分，所述被支撑部分还包括第一和第二位移部分，具有高热阻的热分离部分，以及接收辐射并将辐射转换成辐射的辐射吸收部分 第一和第二位移部分每个还包括至少两层具有不同膨胀系数的不同类型的物质彼此重叠，其中第一位移部分机械地连续到基部而不通过热分离部分， 辐射吸收部分和第二位移部分通过热分离部分和第一位移部分机械地连接到基部，第二位移部分热连接到辐射吸收部分，并且热辐射检测器包括热位移元件和 位移读取构件固定到 e是热位移元件的第二位移部分，并用于获得在第二位移部分中产生的特定变化。

公开(公告)号：WO01020346A2

公开(公告)日：2001-03-22

申请号：PCT/US2000/025406

申请日：2000-09-15

IPC: G01J5/40 ,  H04N5/33 ,  G01R

CPC classification number: G01J5/40 ,  H04N5/33

Abstract: A micromechanical sensor and method for detecting electromagnetic radiation involve producing photoelectrons from a metal surface in contact with a semiconductor. The photoelectrons are extracted into the semiconductor, which causes photo-induced bending. The resulting bending is measured, and a signal corresponding to the measured bending is generated and processed. A plurality of individual micromechanical sensors can be arranged in a two-dimensional matrix for imaging applications.

Abstract translation: 本发明涉及一种微机械传感器和检测涉及从与半导体接触的金属表面产生光电子的电磁辐射的方法。 这些光电子到达半导体引起光致弯曲效应。 测量得到的弯曲，并产生和处理与该测量相对应的信号。 几个单独的微机械传感器可以以用于成像应用的二维阵列布置来布置。

公开(公告)号：WO2020252103A1

公开(公告)日：2020-12-17

申请号：PCT/US2020/037135

申请日：2020-06-11

Applicant: RAYTHEON COMPANY

Inventor： THOMAS, Matthew ,  ADAMS, Craig R. ,  BOESCH, Ryan ,  MUSTAFA, Jamal

IPC: G01J5/00 ,  G01J5/02 ,  G01J5/04 ,  G01J5/06 ,  G01J5/08 ,  G01J5/24 ,  G01J5/40

Abstract: A bolometer pixel trigger array includes a substrate, an electrically conductive contact pad formed on the substrate, and bolometer formed on the substrate. The bolometer includes at least one thermally conductive trigger arm having a fixed end coupled to a portion of the bolometer and an electrically conductive free end configured to deflect with respect to the fixed end. At least one trigger arm establishes different operating states of the bolometer pixel trigger in response to the at least one trigger arm realizing different temperatures. The different operating states are configured to change an electrical connection between the at least one trigger arm and the contact pad.

公开(公告)号：WO2012038524A1

公开(公告)日：2012-03-29

申请号：PCT/EP2011/066564

申请日：2011-09-23

Applicant: COMMISSARIAT À L'ÉNERGIE ATOMIQUE ET AUX ÉNERGIES ALTERNATIVES ,  DURAFFOURG, Laurent ,  ANDREUCCI, Philippe

Inventor： DURAFFOURG, Laurent ,  ANDREUCCI, Philippe

IPC: G01J5/40 ,  G01J5/44 ,  G01J5/02

CPC classification number: G01J5/28 ,  G01J5/02 ,  G01J5/023 ,  G01J5/40 ,  G01J5/44 ,  H01L31/18

Abstract: Bolomètre (2) comportant au moins un microsystème ou nanosystème électromécanique, ledit microsystème ou nanosystème comportant un support (8) et une masse mobile (4) suspendue par des poutres (6) au dessus du support (8), ladite masse mobile formant un absorbeur d'un flux optique (F), des électrodes d'actionnement (12) destinées à mettre en vibration la masse mobile (4) et disposées latéralement par rapport à la masse mobile et des électrodes de détection (14) de la variation de la fréquence de vibration de ladite masse mobile (4) disposées latéralement par rapport à la mase mobile (4).

Abstract translation: 本发明涉及一种包括至少一个机电微系统或纳米系统的测辐射热计（2），所述微系统或纳米系统包括安装件（8）和悬挂在安装件（8）上方的梁（6）的可移动体（4），所述可移动 主体形成光流（F）吸收体，用于使可移动体（4）振动的致动电极（12），相对于可移动体横向布置;以及电极（14），用于检测所述可移动体的振动频率变化 主体（4），相对于可移动体（4）横向布置。

公开(公告)号：WO2010019161A1

公开(公告)日：2010-02-18

申请号：PCT/US2008/079999

申请日：2008-10-15

Applicant: SIONYX, INC. ,  CAREY, James ,  MCCAFFREY, Nathanial ,  PRALLE, Martin

Inventor： CAREY, James ,  MCCAFFREY, Nathanial ,  PRALLE, Martin

IPC: G01J5/20 ,  G01J5/40 ,  H01L27/146

CPC classification number: H01L27/14669 ,  G01J3/36 ,  G01J5/02 ,  G01J5/023 ,  G01J5/08 ,  G01J5/0846 ,  G01J5/20 ,  G01J5/40 ,  H01L27/14652

Abstract: A detector incorporating a laser-doped element that is favorably absorbing to at least a portion of the electromagnetic spectrum, for example in the infra-red range, is used in a light detector article. Readout circuits permitting a detector to operate in a substantial range of the electromagnetic spectrum, including the visual and infra-red range, enable day and night imaging in some embodiments. Configurations for making the detectors are also disclosed.

Abstract translation: 在光检测器制品中使用包含有利地吸收到电磁光谱的至少一部分的激光掺杂元件的检测器，例如在红外范围内。 允许检测器在包括视觉和红外范围在内的电磁光谱的实质范围内操作的读出电路在一些实施例中使得能够进行日夜成像。 还公开了用于制造检测器的配置。

公开(公告)号：WO0120346A3

公开(公告)日：2001-11-22

申请号：PCT/US0025406

申请日：2000-09-15

Applicant: UT BATTELLE LLC

Inventor： DATSKOS PANAGIOTIS G ,  RAJIC SLOBODAN ,  DATSKOU IRENE ,  EGERT CHARLES M DI

IPC: G01J5/40 ,  H04N5/33 ,  G01J1/00 ,  G01J5/00 ,  G01J5/10

CPC classification number: G01J5/40 ,  H04N5/33

Abstract: A micromechanical sensor and method for detecting electromagnetic radiation involve producing photoelectrons from a metal surface in contact with a semiconductor. The photoelectrons are extracted into the semiconductor, which causes photo-induced bending. The resulting bending is measured, and a signal corresponding to the measured bending is generated and processed. A plurality of individual micromechanical sensors can be arranged in a two-dimensional matrix for imaging applications.

Abstract translation: 用于检测电磁辐射的微机械传感器和方法涉及从与半导体接触的金属表面产生光电子。 光电子被提取到半导体中，这引起光诱导的弯曲。 测量所得到的弯曲，产生并处理与所测量的弯曲相对应的信号。 可以将多个单独的微机械传感器布置在用于成像应用的二维矩阵中。