公开(公告)号：WO99016096A1

公开(公告)日：1999-04-01

申请号：PCT/US1998/018038

申请日：1998-08-28

IPC: B81B3/00 ,  B81C1/00 ,  F03G7/06 ,  F15C5/00 ,  F16K99/00 ,  G02B6/38 ,  G02B6/42 ,  H01H1/00 ,  H01H9/14 ,  H01H61/00 ,  H01H61/02 ,  H01H65/00 ,  H01H67/26 ,  H04Q1/16

CPC classification number: F16K99/0001 ,  B81B3/0024 ,  B81B3/0054 ,  B81B2201/031 ,  B81B2201/054 ,  B81B2203/0109 ,  B81B2203/051 ,  F03G7/06 ,  F15C5/00 ,  F16K99/0011 ,  F16K99/0034 ,  F16K99/0044 ,  F16K2099/0071 ,  F16K2099/0074 ,  F16K2099/008 ,  G02B6/3803 ,  G02B6/4226 ,  H01H1/0036 ,  H01H9/14 ,  H01H61/00 ,  H01H61/02 ,  H01H67/26 ,  H01H2001/0042 ,  H01H2001/0047 ,  H01H2001/0068 ,  H01H2061/006 ,  Y10T29/49105

Abstract: A MEMS actuator is provided that produces significant forces and displacements while consumming a reasonable amount of power. The MEMS actuator includes a microelectronic substrate, spaced apart supports on the substrate and a metallic arched beam extending between the spaced apart supports. The MEMS actuator also includes a heater for heating the arched beam to cause futher arching of the beam. In order to effectively transfer heat from the heater to the metallic arched beam, the metallic arched beam extends over and is spaced, albeit slightly, from the heater. As such, the MEMS actuator effectively converts the heat generated by the heater into mechanical motion of the metallic arched beam. A family of other MEMS devices, such as relays, switching arrays and valves, are also provided that include one or more MEMS actuators in order to take advantage of its efficient operating characteristics. In addition, a method of fabricating a MEMS actuator is further provided.

Abstract translation: 提供了一种MEMS致动器，其在消耗合理的功率的同时产生显着的力和位移。 MEMS致动器包括微电子基板，在基板上的间隔开的支撑件和在间隔开的支撑件之间延伸的金属拱形梁。 MEMS致动器还包括加热器，用于加热拱形梁以引起梁的更远的拱形。 为了有效地将热量从加热器传递到金属拱形梁，金属拱形梁从加热器延伸过去并且稍微间隔开。 因此，MEMS致动器有效地将由加热器产生的热量转换成金属拱形梁的机械运动。 还提供了一系列其它MEMS器件，例如继电器，开关阵列和阀，其包括一个或多个MEMS致动器以便利用其有效的操作特性。 此外，还提供了一种制造MEMS致动器的方法。

公开(公告)号：WO2004027799A3

公开(公告)日：2004-06-03

申请号：PCT/US0329254

申请日：2003-09-17

Applicant: MAGFUSION INC ,  SHEN JUN ,  WEI CHENG PING ,  GORANSON MARK

Inventor： SHEN JUN ,  WEI CHENG PING ,  GORANSON MARK

IPC: H01H1/00 ,  H01H49/00 ,  H01H50/00 ,  H01H11/00 ,  H01H11/02 ,  H01H11/04 ,  H01H65/00

CPC classification number: H01H50/005 ,  H01H1/0036 ,  H01H49/00 ,  H01H2050/007 ,  Y10T29/42 ,  Y10T29/43 ,  Y10T29/435 ,  Y10T29/49016 ,  Y10T29/49105 ,  Y10T156/1052

Abstract: Methods and systems of assembling and making laminated electro-mechanical systems and structures are described. A plurality of structural layers (104, 106, 108, 110, 112, 114) are formed that include at least one structural layer having a movable element (108) formed therein. The plurality of structural layers (104, 106, 108, 110, 112, 114) are stacked and aligned into a stack (116). Each structural layer in the stack is attached to an adjacent structural layer of the stack.

Abstract translation: 描述组装和制造层压机电系统和结构的方法和系统。 形成多个结构层（104,106,108,110,112,114），其包括至少一个具有形成在其中的可移动元件（108）的结构层。 多个结构层（104,106,108,110,112,114）被堆叠并排列成堆叠（116）。 堆叠中的每个结构层连接到堆叠的相邻结构层。