Invention Grant
- Patent Title: Plasma etching of diamond surfaces
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Application No.: US14685553Application Date: 2015-04-13
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Publication No.: US10011491B2Publication Date: 2018-07-03
- Inventor: Chee-Leong Lee , Erdan Gu , Geoffrey Alan Scarsbrook , Ian Friel , Martin David Dawson
- Applicant: Element Six Technologies Limited
- Applicant Address: GB Didcot, Oxfordshire
- Assignee: Element Six Technologies Limited
- Current Assignee: Element Six Technologies Limited
- Current Assignee Address: GB Didcot, Oxfordshire
- Agency: Kilpatrick Townsend & Stockton LLP
- Agent Dean W. Russell; Clark F. Weight
- Priority: GB0701186.9 20070122; GB0705523.9 20070322; GB0705524.7 20070322; GB0709716.5 20070521; GB0713464.6 20070711
- Main IPC: C23C16/27
- IPC: C23C16/27 ; C01B31/06 ; C30B25/10 ; C30B25/20 ; C30B29/04 ; G01N27/30 ; H01L21/02 ; H01L21/04 ; H01L29/04 ; H01L29/16 ; H01L29/167 ; H01L29/36 ; G01N21/87 ; G01N21/95 ; H01J37/32 ; C01B32/28
Abstract:
A polycrystalline CVD diamond material comprising a surface having a surface roughness Rq of less than 5 nm, wherein said surface is damage free to the extent that if an anisotropic thermal revealing etch is applied thereto, a number density of defects revealed by the anisotropic thermal revealing etch is less than 100 per mm2.
Public/Granted literature
- US20150266741A1 PLASMA ETCHING OF DIAMOND SURFACES Public/Granted day:2015-09-24
Information query
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