Invention Grant
- Patent Title: Multi-gate vertical field effect transistor with channel strips laterally confined by gate dielectric layers, and method of making thereof
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Application No.: US15400244Application Date: 2017-01-06
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Publication No.: US10032908B1Publication Date: 2018-07-24
- Inventor: Perumal Ratnam , Christopher Petti , Juan Saenz , Guangle Zhou , Abhijit Bandyopadhyay , Tanmay Kumar
- Applicant: SANDISK TECHNOLOGIES LLC
- Applicant Address: US TX Addison
- Assignee: SANDISK TECHNOLOGIES LLC
- Current Assignee: SANDISK TECHNOLOGIES LLC
- Current Assignee Address: US TX Addison
- Agency: The Marbury Law Group PLLC
- Main IPC: H01L29/78
- IPC: H01L29/78 ; H01L27/24 ; H01L29/423 ; H01L23/528 ; H01L29/66

Abstract:
A matrix rail structure is formed over a substrate. The matrix rail structure includes a pair of lengthwise sidewalls that extend along a first horizontal direction and comprises, or is at least partially subsequently replaced with, a set of at least one gate electrode rail extending along the first horizontal direction and straight-sidewalled gate dielectrics. A pair of vertical semiconductor channel strips and a pair of laterally-undulating gate dielectrics can be formed on sidewalls of the matrix rail structure for each vertical field effect transistor. At least one laterally-undulating gate electrode extending along the first horizontal direction is formed on the laterally-undulating gate dielectrics. Bottom active regions and top active regions are formed at end portions of the vertical semiconductor channel strips. The vertical field effect transistors can be formed as a two-dimensional array, and may be employed as access transistors for a three-dimensional memory device.
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