Invention Grant
- Patent Title: Coating method, computer storage medium and coating apparatus
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Application No.: US14963802Application Date: 2015-12-09
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Publication No.: US10048664B2Publication Date: 2018-08-14
- Inventor: Takafumi Hasimoto , Shinichi Hatakeyama , Naoki Shibata , Kousuke Yoshihara , Minoru Kubota , Hiroyuki Ide
- Applicant: Tokyo Electron Limited
- Applicant Address: JP Minato-Ku
- Assignee: Tokyo Electron Limited
- Current Assignee: Tokyo Electron Limited
- Current Assignee Address: JP Minato-Ku
- Agency: Burr & Brown, PLLC
- Priority: JP2014-250571 20141211
- Main IPC: B05C5/00
- IPC: B05C5/00 ; G05B15/02 ; H01L21/02 ; B05C13/02 ; B05B1/00 ; B05D1/00 ; G03F7/16 ; H01L21/67 ; B05D3/04 ; B05D3/10

Abstract:
There is provided a coating method which can apply a coating solution uniformly onto a substrate surface while reducing the amount of the coating solution supplied. The coating method for applying a coating solution onto a wafer includes the steps of: supplying a solvent for the coating solution onto the wafer to form an annular liquid film of the solvent in a peripheral area of the wafer; supplying the coating solution to the center of the wafer while rotating the wafer at a first rotational speed (time t1-t2); and allowing the coating solution to spread on the wafer by rotating the wafer at a second rotational speed which is higher than the first rotational speed (time t4-t5). The supply of the solvent is continued until just before the coating solution comes into contact with the liquid film of the solvent (time t0-t3).
Public/Granted literature
- US20160167079A1 COATING METHOD, COMPUTER STORAGE MEDIUM AND COATING APPARATUS Public/Granted day:2016-06-16
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