Invention Grant
- Patent Title: High electron mobility transistors
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Application No.: US15242653Application Date: 2016-08-22
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Publication No.: US10109729B2Publication Date: 2018-10-23
- Inventor: Po-Chun Liu , Chung-Yi Yu , Chi-Ming Chen , Chen-Hao Chiang
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Eschweiler & Potashnik, LLC
- Main IPC: H01L29/15
- IPC: H01L29/15 ; H01L31/0256 ; H01L29/66 ; H01L21/338 ; H01L29/778 ; H01L29/43 ; H01L29/20 ; H01L29/205 ; H01L29/201

Abstract:
The present disclosure relates to a transistor device having a donor bi-layer configured to provide low-resistance to source and drain contacts while maintaining a high-mobility two-dimensional electron gas within a channel layer, and an associated method of formation. In some embodiments, the transistor device has a channel layer disposed over a substrate and a donor bi-layer disposed over the channel layer. The donor bi-layer includes a mobility-enhancing layer of AlzGa(1-z)N disposed over the channel layer and having a first molar fraction z in a first range, and a resistance-reducing layer of AlxGa(1-x)N disposed on and in contact with the mobility-enhancing layer of AlzGa(1-z)N and having a second molar fraction x in a second range less than the first range. Source and drain contacts are over the resistance-reducing layer of AlxGa(1-x)N. The donor bi-layer has a conduction band energy that monotonically decreases from top to bottom surfaces of the donor bi-layer.
Public/Granted literature
- US20160359034A1 HIGH ELECTRON MOBILITY TRANSISTORS Public/Granted day:2016-12-08
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