- 专利标题: Pattern forming method and resist composition
-
申请号: US13580921申请日: 2011-02-24
-
公开(公告)号: US10126653B2公开(公告)日: 2018-11-13
- 发明人: Kaoru Iwato , Shohei Kataoka , Shinji Tarutani , Sou Kamimura , Keita Kato , Yuichiro Enomoto , Kazuyoshi Mizutani , Toru Tsuchihashi , Kana Fujii
- 申请人: Kaoru Iwato , Shohei Kataoka , Shinji Tarutani , Sou Kamimura , Keita Kato , Yuichiro Enomoto , Kazuyoshi Mizutani , Toru Tsuchihashi , Kana Fujii
- 申请人地址: JP Tokyo
- 专利权人: FUJIFILM Corporation
- 当前专利权人: FUJIFILM Corporation
- 当前专利权人地址: JP Tokyo
- 代理机构: Sughrue Mion, PLLC
- 优先权: JP2010-043281 20100226; JP2010-143185 20100623; JP2011-029622 20110215
- 国际申请: PCT/JP2011/054840 WO 20110224
- 国际公布: WO2011/105626 WO 20110901
- 主分类号: G03F7/30
- IPC分类号: G03F7/30 ; G03F7/004 ; G03F7/38 ; G03F7/075 ; G03F7/038 ; G03F7/039 ; G03F7/11 ; G03F7/20 ; G03F7/32
摘要:
Provided is a method of forming a pattern, ensuring excellent sensitivity, limiting resolving power, roughness characteristic, exposure latitude (EL), dependence on post-exposure bake (PEB) temperature and focus latitude (depth of focus DOF), and a resist composition for use in the method. The method comprises (A) forming a film from a resist composition comprising a resin containing a repeating unit containing a group that is decomposed when acted on by an acid to thereby produce an alcoholic hydroxyl group, which resin thus when acted on by an acid decreases its solubility in a developer containing an organic solvent, (B) exposing the film to light, and (C) developing the exposed film using a developer containing an organic solvent.
公开/授权文献
- US20120321855A1 PATTERN FORMING METHOD AND RESIST COMPOSITION 公开/授权日:2012-12-20
信息查询
IPC分类: