- 专利标题: Three-dimensional memory device containing support pillars underneath a retro-stepped dielectric material and method of making thereof
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申请号: US15607583申请日: 2017-05-29
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公开(公告)号: US10141331B1公开(公告)日: 2018-11-27
- 发明人: Hiromasa Susuki , Masanori Tsutsumi , Shigehisa Inoue , Junji Oh , Kensuke Yamaguchi , Seiji Shimabukuro , Yuji Fukano , Ryoichi Ehara , Youko Furihata
- 申请人: SANDISK TECHNOLOGIES LLC
- 申请人地址: US TX Addison
- 专利权人: SANDISK TECHNOLOGIES LLC
- 当前专利权人: SANDISK TECHNOLOGIES LLC
- 当前专利权人地址: US TX Addison
- 代理机构: The Marbury Law Group PLLC
- 主分类号: H01L29/76
- IPC分类号: H01L29/76 ; H01L27/11582 ; H01L27/11524 ; H01L27/11556 ; H01L27/1157
摘要:
A three-dimensional memory device includes an alternating stack of insulating layers and electrically conductive layers located over a substrate, the alternating stack containing a memory array region and a terrace region. Memory stack structures containing a memory film and a vertical semiconductor channel extend through the memory array region of the alternating stack. Support pillar structures extending through the terrace region of the alternating stack. The support pillar structures have different heights from each other.
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