Invention Grant
- Patent Title: Devices and methods for forming cross coupled contacts
-
Application No.: US15136384Application Date: 2016-04-22
-
Publication No.: US10262941B2Publication Date: 2019-04-16
- Inventor: Guillaume Bouche , Jason Eugene Stephens , Tuhin Guha Neogi , Kai Sun , Deniz Elizabeth Civay , David Charles Pritchard , Andy Wei
- Applicant: GLOBALFOUNDRIES Inc.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee Address: KY Grand Cayman
- Agency: Heslin Rothenberg Farley & Mesiti P.C.
- Agent Jacquelyn A. Graff
- Main IPC: H01L21/33
- IPC: H01L21/33 ; H01L23/528 ; H01L21/033 ; H01L21/311 ; H01L21/3213 ; H01L21/762 ; H01L21/768 ; H01L23/522

Abstract:
Semiconductor devices and methods of fabricating the semiconductor devices with cross coupled contacts using patterning for cross couple pick-up are disclosed. One method includes, for instance: obtaining an intermediate semiconductor device; performing a first lithography to pattern a first shape; performing a second lithography to pattern a second shape overlapping a portion of the first shape; processing the first shape and the second shape to form an isolation region at the overlap; and forming four regions separated by the isolation region. An intermediate semiconductor device is also disclosed.
Public/Granted literature
- US20170309560A1 DEVICES AND METHODS FOR FORMING CROSS COUPLED CONTACTS Public/Granted day:2017-10-26
Information query
IPC分类: