Invention Grant
- Patent Title: Method of forming cobalt contact module and cobalt contact module formed thereby
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Application No.: US15661029Application Date: 2017-07-27
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Publication No.: US10262942B2Publication Date: 2019-04-16
- Inventor: Qiang Fang , Haigou Huang , Shafaat Ahmed , Changhong Wu , Dinesh R. Koli
- Applicant: GLOBALFOUNDRIES INC.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES INC.
- Current Assignee: GLOBALFOUNDRIES INC.
- Current Assignee Address: KY Grand Cayman
- Agency: Hoffman Warnick LLC
- Agent Anthony Canale
- Main IPC: H01L21/4763
- IPC: H01L21/4763 ; H01L23/12 ; H01L23/532 ; H01L21/768 ; H01L21/288 ; H01L21/285 ; H01L21/3213
Abstract:
The disclosure relates to a method of forming a Co contact module, the method including depositing a liner layer on a trench block, partially plating the lined trenches with Co as a first metal such that the resulting Co layer has a top surface below an opening top surface of a shallowest trench, depositing a second metal on the Co layer and exposed surfaces of the liner layer, planarizing the second metal layer, and etching the second metal layer and portions of the liner layer. The disclosure also relates to a Co contact module formed by the noted method.
Public/Granted literature
- US20190035739A1 METHOD OF FORMING COBALT CONTACT MODULE AND COBALT CONTACT MODULE FORMED THEREBY Public/Granted day:2019-01-31
Information query
IPC分类:
