Invention Grant
- Patent Title: Semiconductor device and wafer with reference circuit and related methods
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Application No.: US15694156Application Date: 2017-09-01
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Publication No.: US10274395B2Publication Date: 2019-04-30
- Inventor: Jean-Francois Carpentier , Patrick Le Maitre , Jean-Robert Manouvrier , Charles Baudot , Bertrand Borot
- Applicant: STMicroelectronics (Crolles 2) SAS , STMICROELECTRONICS SA
- Applicant Address: FR Montrouge FR Crolles
- Assignee: STMICROELECTRONICS SA,STMICROELECTRONICS (CROLLES 2) SAS
- Current Assignee: STMICROELECTRONICS SA,STMICROELECTRONICS (CROLLES 2) SAS
- Current Assignee Address: FR Montrouge FR Crolles
- Agency: Slater Matsil, LLP
- Main IPC: G01M11/02
- IPC: G01M11/02 ; G02B6/28 ; G02B6/34 ; G02B6/12 ; G01R31/265 ; G01R31/27 ; G01R31/28 ; G01R31/303 ; G01R31/311 ; G01R31/317 ; G01R35/00 ; G02B6/00 ; G01M11/00

Abstract:
A semiconductor device may include a semiconductor wafer, and a reference circuit carried by the semiconductor wafer. The reference circuit may include optical DUTs, a first set of photodetectors coupled to outputs of the optical DUTs, an optical splitter coupled to inputs of the optical DUTs, and a second set of photodetectors coupled to the optical splitter. The optical splitter is to be coupled to an optical source and configured to transmit a reference optical signal to the first set of photodetectors via the optical DUTs and the second set of photodetectors.
Public/Granted literature
- US20170363507A1 SEMICONDUCTOR DEVICE AND WAFER WITH REFERENCE CIRCUIT AND RELATED METHODS Public/Granted day:2017-12-21
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