- 专利标题: Laser processing method and device
-
申请号: US15255926申请日: 2016-09-02
-
公开(公告)号: US10293433B2公开(公告)日: 2019-05-21
- 发明人: Kazuhiro Atsumi , Koji Kuno , Masayoshi Kusunoki , Tatsuya Suzuki , Kenshi Fukumitsu , Fumitsugu Fukuyo
- 申请人: HAMAMATSU PHOTONICS K.K.
- 申请人地址: JP Hamamatsu-shi, Shizuoka
- 专利权人: HAMAMATSU PHOTONICS K.K.
- 当前专利权人: HAMAMATSU PHOTONICS K.K.
- 当前专利权人地址: JP Hamamatsu-shi, Shizuoka
- 代理机构: Drinker Biddle & Reath LLP
- 优先权: JP2004-004304 20040109
- 主分类号: B23K26/04
- IPC分类号: B23K26/04 ; B23K26/046 ; H01L21/67 ; B23K26/53 ; B28D5/00 ; H01L21/78 ; B23K26/06 ; B23K26/00 ; B23K26/38 ; B23K26/40 ; B23K101/40 ; B23K103/00
摘要:
A laser processing method which can efficiently perform laser processing while minimizing the deviation of the converging point of a laser beam in end parts of an object to be processed is provided.This laser processing method comprises a preparatory step of holding a lens at an initial position set such that a converging point is located at a predetermined position within the object; a first processing step (S11 and S12) of emitting a first laser beam for processing while holding the lens at the initial position, and moving the lens and the object relative to each other along a main surface so as to form a modified region in one end part of a line to cut; and a second processing step (S13 and S14) of releasing the lens from being held at the initial position after forming the modified region in the one end part of the line to cut, and then moving the lens and the object relative to each other along the main surface while adjusting the gap between the lens and the main surface after the release, so as to form the modified region.
公开/授权文献
- US20160368085A1 LASER PROCESSING METHOD AND DEVICE 公开/授权日:2016-12-22
信息查询
IPC分类: