Invention Grant
- Patent Title: Composite isolation structures for a fin-type field effect transistor
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Application No.: US15689711Application Date: 2017-08-29
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Publication No.: US10297597B2Publication Date: 2019-05-21
- Inventor: Min Gyu Sung , Ruilong Xie , Chanro Park , Murat Kerem Akarvardar
- Applicant: GLOBALFOUNDRIES Inc.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee Address: KY Grand Cayman
- Agency: Thompson Hine LLP
- Agent Anthony Canale
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H01L27/088 ; H01L21/8234 ; H01L21/311 ; H01L29/06 ; H01L21/02 ; H01L21/3105

Abstract:
Structures for the isolation of a fin-type field-effect transistor and methods of forming isolation for a fin-type field-effect transistor. A first dielectric layer is formed that encapsulates a plurality of fins. A second dielectric layer is formed that surrounds the first dielectric layer and the plurality of fins. A surface of the second dielectric layer relative to a surface of the first dielectric layer. A liner is conformally deposited on the surface of the first dielectric layer and on the recessed surface of the second dielectric layer. A section of the liner is removed to expose the surface of the first dielectric layer. The exposed surface of the first dielectric layer is recessed to reveal a portion of each of the plurality of fins.
Public/Granted literature
- US20180096998A1 COMPOSITE ISOLATION STRUCTURES FOR A FIN-TYPE FIELD EFFECT TRANSISTOR Public/Granted day:2018-04-05
Information query
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