Invention Grant
- Patent Title: Back-side deep trench isolation (BDTI) structure for pinned photodiode image sensor
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Application No.: US15795681Application Date: 2017-10-27
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Publication No.: US10304886B2Publication Date: 2019-05-28
- Inventor: Yen-Ting Chiang , Dun-Nian Yaung , Hsiao-Hui Tseng , Jen-Cheng Liu , Yu-Jen Wang , Chun-Yuan Chen
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Eschweiler & Potashnik, LLC
- Main IPC: H01L27/146
- IPC: H01L27/146

Abstract:
The present disclosure relates to a CMOS image sensor having a photodiode surrounded by a back-side deep trench isolation (BDTI) structure, and an associated method of formation. In some embodiments, a plurality of pixel regions is disposed within a substrate and respectively comprising a photodiode. A back-side deep trench isolation (BDTI) structure is disposed between adjacent pixel regions, extending from a back-side of the substrate to a position within the substrate. The BDTI structure comprises a doped layer lining a sidewall surface of a deep trench and a dielectric fill layer filling a remaining space of the deep trench. By forming the disclosed BDTI structure that functions as a doped well and an isolation structure, the implantation processes from a front-side of the substrate is simplified, and thus the exposure resolution, the full well capacity of the photodiode, and the pinned voltage is improved.
Public/Granted literature
- US20190096929A1 BACK-SIDE DEEP TRENCH ISOLATION (BDTI) STRUCTURE FOR PINNED PHOTODIODE IMAGE SENSOR Public/Granted day:2019-03-28
Information query
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