- 专利标题: Logic circuit based on thin film transistor
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申请号: US15817540申请日: 2017-11-20
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公开(公告)号: US10326089B2公开(公告)日: 2019-06-18
- 发明人: Yu-Dan Zhao , Yu-Jia Huo , Xiao-Yang Xiao , Ying-Cheng Wang , Tian-Fu Zhang , Yuan-Hao Jin , Qun-Qing Li , Shou-Shan Fan
- 申请人: Tsinghua University , HON HAI PRECISION INDUSTRY CO., LTD.
- 申请人地址: CN Beijing TW New Taipei
- 专利权人: Tsinghua University,HON HAI PRECISION INDUSTRY CO., LTD.
- 当前专利权人: Tsinghua University,HON HAI PRECISION INDUSTRY CO., LTD.
- 当前专利权人地址: CN Beijing TW New Taipei
- 代理机构: ScienBiziP, P.C.
- 优先权: CN201611114619 20161207
- 主分类号: H01L29/745
- IPC分类号: H01L29/745 ; H01L51/05 ; H01L29/786 ; H01L21/285 ; H01L27/12 ; H01L27/32 ; H01L51/00 ; H01L29/51 ; H03K19/094 ; H01L27/06 ; H01L29/778
摘要:
The disclosure relates to a logic circuit. The logic circuit includes a n-type thin film transistor and a p-type thin film transistor. Each thin film transistor includes a substrate; a semiconductor layer including nano-scaled semiconductor materials; a source and a drain, wherein the source and the drain are spaced apart from each other, and electrically connected to the semiconductor layer; a dielectric layer covering the semiconductor layer, wherein the dielectric layer includes a normal dielectric layer and an abnormal dielectric layer stacked on one another, and the abnormal dielectric layer is an oxide dielectric layer grown by magnetron sputtering; and a gate in direct contact with the abnormal dielectric layer. The n-type thin film transistor and the p-type thin film transistor share the same substrate and the same gate.
公开/授权文献
- US20180159057A1 LOGIC CIRCUIT BASED ON THIN FILM TRANSISTOR 公开/授权日:2018-06-07
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