Invention Grant
- Patent Title: Germanium-based photoreceiver having tungsten contacts
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Application No.: US15703525Application Date: 2017-09-13
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Publication No.: US10355161B2Publication Date: 2019-07-16
- Inventor: Teruhiro Kuwajima , Shinichi Watanuki , Futoshi Komatsu , Tomoo Nakayama
- Applicant: RENESAS ELECTRONICS CORPORATION
- Applicant Address: JP Tokyo
- Assignee: RENESAS ELECTRONICS CORPORATION
- Current Assignee: RENESAS ELECTRONICS CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: McDermott Will & Emery LLP
- Priority: JP2016-182523 20160920
- Main IPC: H01L31/18
- IPC: H01L31/18 ; H01L31/028 ; H01L31/105 ; H01L31/0224

Abstract:
To achieve a high-reliability germanium photoreceiver. A photoreceiver portion of a germanium photoreceiver comprised of a p type silicon core layer, an i type germanium layer, and an n type silicon layer is covered with a second insulating film and from a coupling hole formed in the second insulating film, a portion of the upper surface of the photoreceiver portion is exposed. The coupling hole has, on the inner wall thereof, a barrier metal film and the barrier metal film has thereon a first-layer wiring made of a tungsten film. Tungsten hardly diffuses from the tungsten film into the i type germanium layer even when a thermal stress is applied, making it possible to prevent the resulting germanium photoreceiver from having diode characteristics deteriorated by the thermal stress.
Public/Granted literature
- US20180083154A1 SEMICONDUCTOR DEVICE Public/Granted day:2018-03-22
Information query
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