发明授权
- 专利标题: Multilayered seed structure for magnetic memory element including a CoFeB seed layer
-
申请号: US16287987申请日: 2019-02-27
-
公开(公告)号: US10438997B2公开(公告)日: 2019-10-08
- 发明人: Zihui Wang , Yiming Huai
- 申请人: Avalanche Technology, Inc.
- 申请人地址: US CA Fremont
- 专利权人: Avalanche Technology, Inc.
- 当前专利权人: Avalanche Technology, Inc.
- 当前专利权人地址: US CA Fremont
- 代理商 Bing K. Yen
- 主分类号: H01L27/22
- IPC分类号: H01L27/22 ; H01L43/10 ; H01L43/02 ; H01L43/08 ; G11C11/16
摘要:
The present invention is directed to a magnetic structure including a first seed layer, which is made of a first transition metal, formed on top of a second seed layer comprising cobalt, iron, and boron; and a magnetic fixed layer structure formed on top of the first seed layer and having a first invariable magnetization direction substantially perpendicular to a layer plane thereof. The magnetic fixed layer structure includes layers of a first magnetic material interleaved with layers of a second transition metal. The first transition metal may be chromium or iridium. The second transition metal may be nickel, platinum, palladium, or iridium. The second seed layer which comprises cobalt, iron, and boron, may have a noncrystalline structure. Moreover, the second seed layer may be non-magnetic or superparamagnetic. The magnetic structure may further includes a third seed layer, which may comprise tantalum, formed adjacent to the second seed layer opposite the first seed layer.
公开/授权文献
- US20190198566A1 Multilayered Seed for Magnetic Structure 公开/授权日:2019-06-27
信息查询
IPC分类: