Invention Grant
- Patent Title: Dissolved ozone removal unit, apparatus for treating substrate, method of removing dissolved ozone, and method of cleaning substrate
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Application No.: US15297728Application Date: 2016-10-19
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Publication No.: US10453672B2Publication Date: 2019-10-22
- Inventor: Byungsun Bang , Junhee Youn , Kilsung Kwon
- Applicant: SEMES CO., LTD.
- Applicant Address: KR Chungcheongnam-Do
- Assignee: SEMES CO., LTD.
- Current Assignee: SEMES CO., LTD.
- Current Assignee Address: KR Chungcheongnam-Do
- Agency: Carter, DeLuca & Farrell LLP
- Priority: KR10-2015-0149307 20151027
- Main IPC: B08B3/14
- IPC: B08B3/14 ; H01L21/02 ; B01D19/00 ; B08B3/08 ; B08B3/10 ; C02F1/20 ; H01L21/67 ; C02F103/34
Abstract:
Disclosed are a dissolved ozone removal unit that removes dissolved ozone from liquid, an apparatus for treating a substrate, a method of removing dissolved ozone, and a method of cleaning a substrate. The method of removing dissolved ozone in liquid includes supplying micro bubbles to the liquid, and allowing dissolved ozone to exit from the liquid by energy or radical ions that are generated while the micro bubbles are dissolved in the liquid.
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