公开(公告)号：US10453672B2

公开(公告)日：2019-10-22

申请号：US15297728

申请日：2016-10-19

Applicant: SEMES CO., LTD.

Inventor： Byungsun Bang ,  Junhee Youn ,  Kilsung Kwon

IPC: B08B3/14 ,  H01L21/02 ,  B01D19/00 ,  B08B3/08 ,  B08B3/10 ,  C02F1/20 ,  H01L21/67 ,  C02F103/34

Abstract: Disclosed are a dissolved ozone removal unit that removes dissolved ozone from liquid, an apparatus for treating a substrate, a method of removing dissolved ozone, and a method of cleaning a substrate. The method of removing dissolved ozone in liquid includes supplying micro bubbles to the liquid, and allowing dissolved ozone to exit from the liquid by energy or radical ions that are generated while the micro bubbles are dissolved in the liquid.