Invention Grant
- Patent Title: Exchange and flip chamber design for heterojunction solar cell formation
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Application No.: US15812922Application Date: 2017-11-14
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Publication No.: US10453728B2Publication Date: 2019-10-22
- Inventor: Kyung-Tae Kim , Su Ho Cho , Tsunehiko Kitamura , Shinobu Abe , Shuran Sheng
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: APPLIED MATERIALS, INC.
- Current Assignee: APPLIED MATERIALS, INC.
- Current Assignee Address: US CA Santa Clara
- Agency: Patterson + Sheridan LLP
- Main IPC: C23C16/00
- IPC: C23C16/00 ; H01L21/677 ; H01L31/18 ; H01L21/67
Abstract:
In one embodiment, a chamber is provided that includes a chamber body and a lid defining an interior volume, a frame within the interior volume, the frame sized to receive a plurality of substrates in a first orientation, and a rotational drive assembly coupled to the frame for rotating the frame and flipping each of the plurality of substrates to a second orientation that is different than the first orientation.
Public/Granted literature
- US20180144966A1 EXCHANGE AND FLIP CHAMBER DESIGN FOR HETEROJUNCTION SOLAR CELL FORMATION Public/Granted day:2018-05-24
Information query
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