公开(公告)号：US10453728B2

公开(公告)日：2019-10-22

申请号：US15812922

申请日：2017-11-14

Applicant: Applied Materials, Inc.

Inventor： Kyung-Tae Kim ,  Su Ho Cho ,  Tsunehiko Kitamura ,  Shinobu Abe ,  Shuran Sheng

IPC: C23C16/00 ,  H01L21/677 ,  H01L31/18 ,  H01L21/67

Abstract: In one embodiment, a chamber is provided that includes a chamber body and a lid defining an interior volume, a frame within the interior volume, the frame sized to receive a plurality of substrates in a first orientation, and a rotational drive assembly coupled to the frame for rotating the frame and flipping each of the plurality of substrates to a second orientation that is different than the first orientation.