Invention Grant
- Patent Title: Magnetoresistive random access memory devices and methods of manufacturing the same
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Application No.: US16108192Application Date: 2018-08-22
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Publication No.: US10559746B2Publication Date: 2020-02-11
- Inventor: Yong-Sung Park , Woo-Jin Kim , Jeong-Heon Park , Se-Chung Oh , Joon-Myoung Lee , Hyun Cho
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR Suwon-Si
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon-Si
- Agency: Myers Bigel, P.A.
- Priority: KR10-2017-0139625 20171025
- Main IPC: H01L43/12
- IPC: H01L43/12 ; H01L43/02 ; H01L27/22 ; H01L43/10

Abstract:
The methods of manufacturing an MRAM device and MRAM devices are provided. The methods may include forming a first electrode on an upper surface of a substrate, forming a first magnetic layer on the first electrode, forming a tunnel barrier structure on the first magnetic layer, forming a second magnetic layer on the tunnel barrier structure, and forming a second electrode on the second magnetic layer. The tunnel barrier structure may include a first tunnel barrier layer and a second tunnel barrier layer that are sequentially stacked on the first magnetic layer and may have different resistivity distributions from each other along a horizontal direction that may be parallel to the upper surface of the substrate.
Public/Granted literature
- US20190123263A1 MAGNETORESISTIVE RANDOM ACCESS MEMORY DEVICES AND METHODS OF MANUFACTURING THE SAME Public/Granted day:2019-04-25
Information query
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