Invention Grant
- Patent Title: Tungsten buff polishing compositions with improved topography
-
Application No.: US15864720Application Date: 2018-01-08
-
Publication No.: US10647887B2Publication Date: 2020-05-12
- Inventor: Kevin P. Dockery , Pankaj K. Singh , Steven Grumbine , Kim Long
- Applicant: Cabot Microelectronics Corporation
- Applicant Address: US IL Aurora
- Assignee: Cabot Microelectronics Corporation
- Current Assignee: Cabot Microelectronics Corporation
- Current Assignee Address: US IL Aurora
- Agent Thomas Omholt; Erika S. Wilson; Derek W. Barnett
- Main IPC: B24B37/04
- IPC: B24B37/04 ; C09G1/02 ; C09K3/14

Abstract:
The invention provides a chemical-mechanical polishing composition comprising a) surface-modified colloidal silica particles, comprising a negatively-charged group on the surface of the particles, wherein the surface-modified colloidal silica particles have a negative charge, a particle size of about 90 nm to about 350 nm, and a zeta potential of about −5 mV to about −35 mV at a pH of about 3, b) an iron compound, c) a stabilizing agent, d) a corrosion inhibitor, and e) an aqueous carrier. The invention also provides a method suitable for polishing a substrate.
Public/Granted literature
- US20190211227A1 TUNGSTEN BUFF POLISHING COMPOSITIONS WITH IMPROVED TOPOGRAPHY Public/Granted day:2019-07-11
Information query