- 专利标题: Composition for tungsten CMP
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申请号: US16236962申请日: 2018-12-31
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公开(公告)号: US10676647B1公开(公告)日: 2020-06-09
- 发明人: Na Zhang , Kevin P. Dockery , Zhao Liu , Roman A. Ivanov
- 申请人: Cabot Microelectronics Corporation
- 申请人地址: US IL Aurora
- 专利权人: Cabot Microelectronics Corporation
- 当前专利权人: Cabot Microelectronics Corporation
- 当前专利权人地址: US IL Aurora
- 代理商 Thomas Omholt; Erika S. Wilson; Christopher C. Streinz
- 主分类号: G09G1/02
- IPC分类号: G09G1/02 ; C09G1/02 ; H01L21/321
摘要:
A chemical mechanical polishing composition includes a water based liquid carrier, cationic abrasive particles dispersed in the liquid carrier, a first amino acid compound having an isoelectric point of less than 7 and a second amino acid compound having an isoelectric point of greater than 7. The pH of the composition is in a range from about 1 to about 5. A method for chemical mechanical polishing a substrate including a tungsten layer includes contacting the substrate with the above described polishing composition, moving the polishing composition relative to the substrate, and abrading the substrate to remove a portion of the tungsten from the substrate and thereby polish the substrate.
公开/授权文献
- US20200208014A1 COMPOSITION FOR TUNGSTEN CMP 公开/授权日:2020-07-02
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