Invention Grant
- Patent Title: Selective polysilicon doping for gate induced drain leakage improvement
-
Application No.: US16382455Application Date: 2019-04-12
-
Publication No.: US10680019B2Publication Date: 2020-06-09
- Inventor: Chen-Liang Chu , Chih-Wen Albert Yao , Ruey-Hsin Liu , Ming-Ta Lei
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Eschweiler & Potashnik, LLC
- Main IPC: H01L27/12
- IPC: H01L27/12 ; H01L29/49 ; H01L29/66 ; H01L29/78 ; H01L21/28

Abstract:
Some embodiments of the present disclosure relate to a method of forming a transistor. The method includes forming a gate dielectric over a substrate and forming a gate over the gate dielectric. The gate includes polysilicon extending between a first outermost sidewall and a second outermost sidewall of the gate. A mask is formed over the gate. The mask exposes a first gate region extending to the first outermost sidewall and covers a second gate region extending between the first gate region and the second outermost sidewall. Dopants are selectively implanted into the first gate region according to the mask. Source and drain regions are formed within the substrate. The source region and the drain region are asymmetric with respect to an interface of the first gate region and the second gate region and extend to substantially equal distances past the first and second outermost sidewalls of the gate, respectively.
Public/Granted literature
- US20190237485A1 SELECTIVE POLYSILICON DOPING FOR GATE INDUCED DRAIN LEAKAGE IMPROVEMENT Public/Granted day:2019-08-01
Information query
IPC分类: