发明授权
- 专利标题: Memory device
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申请号: US16222031申请日: 2018-12-17
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公开(公告)号: US10686125B2公开(公告)日: 2020-06-16
- 发明人: Harry-Hak-Lay Chuang , Hung Cho Wang , Tong-Chern Ong , Wen-Ting Chu , Yu-Wen Liao , Kuei-Hung Shen , Kuo-Yuan Tu , Sheng-Huang Huang
- 申请人: Taiwan Semiconductor Manufacturing Co., Ltd.
- 申请人地址: TW Hsin-Chu
- 专利权人: Taiwan Semiconductor Manufacturing Co., Ltd.
- 当前专利权人: Taiwan Semiconductor Manufacturing Co., Ltd.
- 当前专利权人地址: TW Hsin-Chu
- 代理机构: Eschweiler & Potashnik, LLC
- 主分类号: H01L47/00
- IPC分类号: H01L47/00 ; H01L43/02 ; H01L45/00 ; H01L43/12 ; H01L43/08 ; H01L43/10
摘要:
The present disclosure, in some embodiments, relates to an integrated circuit. The integrated circuit includes a dielectric protection layer disposed over a dielectric structure that laterally surrounds one or more conductive interconnect layers. The dielectric protection layer has a protrusion extending outward from an upper surface of the dielectric protection layer. A bottom electrode is disposed over the dielectric protection layer and has sidewalls extending outward from a lower surface of the bottom electrode through the dielectric protection layer. The bottom electrode has a substantially planar upper surface over the protrusion. A data storage element is over the substantially planar upper surface of the bottom electrode, and a top electrode is over the data storage element.
公开/授权文献
- US20190123264A1 MEMORY DEVICE 公开/授权日:2019-04-25
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