Invention Grant
- Patent Title: Nozzle cleaning device, nozzle cleaning method, and substrate processing apparatus
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Application No.: US13904315Application Date: 2013-05-29
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Publication No.: US10700166B2Publication Date: 2020-06-30
- Inventor: Yoshihiro Kai , Shinya Ishikawa , Yuji Kamikawa , Shuichi Nagamine , Naoki Shindo
- Applicant: Tokyo Electron Limited
- Applicant Address: JP Tokyo
- Assignee: TOKYO ELECTRON LIMITED
- Current Assignee: TOKYO ELECTRON LIMITED
- Current Assignee Address: JP Tokyo
- Agency: Pearne & Gordon LLP
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@626e524c
- Main IPC: B08B9/032
- IPC: B08B9/032 ; H01L29/16 ; B05B15/55 ; B05B15/555 ; B08B3/10 ; H01L21/67 ; H01L29/78 ; B05B1/36

Abstract:
A nozzle cleaning device is capable of uniformly cleaning a nozzle from a front end of the nozzle to an upper part thereof. The nozzle cleaning device includes a storage tank, a liquid discharging portion and an overflow discharging portion. The storage tank has a cylindrical inner peripheral surface and is configured to store therein a cleaning liquid that cleans a nozzle used in a substrate process. The liquid discharging portion is configured to discharge the cleaning liquid into the storage tank toward a position eccentric with respect to a central axis of the cylindrical inner peripheral surface to store the cleaning liquid within the storage tank and configured to form a vortex flow of the cleaning liquid revolving within the storage tank. The overflow discharging portion is configured to discharge the cleaning liquid that overflows the storage tank.
Public/Granted literature
- US20130319470A1 NOZZLE CLEANING DEVICE, NOZZLE CLEANING METHOD, AND SUBSTRATE PROCESSING APPARATUS Public/Granted day:2013-12-05
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