发明授权
- 专利标题: Magnetoresistive random access memory devices and methods of manufacturing the same
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申请号: US16727986申请日: 2019-12-27
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公开(公告)号: US10714678B2公开(公告)日: 2020-07-14
- 发明人: Yong-Sung Park , Woo-Jin Kim , Jeong-Heon Park , Se-Chung Oh , Joon-Myoung Lee , Hyun Cho
- 申请人: Samsung Electronics Co., Ltd.
- 申请人地址: KR Suwon-si
- 专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人地址: KR Suwon-si
- 代理机构: Myers Bigel, P.A.
- 优先权: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@580826f8
- 主分类号: H01L43/02
- IPC分类号: H01L43/02 ; H01L27/22 ; H01L43/10 ; H01L43/12
摘要:
The methods of manufacturing an MRAM device and MRAM devices are provided. The methods may include forming a first electrode on an upper surface of a substrate, forming a first magnetic layer on the first electrode, forming a tunnel barrier structure on the first magnetic layer, forming a second magnetic layer on the tunnel barrier structure, and forming a second electrode on the second magnetic layer. The tunnel barrier structure may include a first tunnel barrier layer and a second tunnel barrier layer that are sequentially stacked on the first magnetic layer and may have different resistivity distributions from each other along a horizontal direction that may be parallel to the upper surface of the substrate.
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