Invention Grant
- Patent Title: Plating apparatus, plating method, and recording medium
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Application No.: US15479429Application Date: 2017-04-05
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Publication No.: US10731256B2Publication Date: 2020-08-04
- Inventor: Kazutoshi Iwai , Nobutaka Mizutani , Yuichiro Inatomi , Takashi Tanaka
- Applicant: Tokyo Electron Limited
- Applicant Address: JP Tokyo
- Assignee: TOKYO ELECTRON LIMITED
- Current Assignee: TOKYO ELECTRON LIMITED
- Current Assignee Address: JP Tokyo
- Agency: Pearne & Gordon LLP
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@2a486fef
- Main IPC: C23C18/34
- IPC: C23C18/34 ; C23C18/16

Abstract:
A plating apparatus, a plating method and a recording medium can allow a temperature of a wafer to be uniform within a surface thereof. A plating apparatus 1 includes a substrate holding unit 52 configured to hold a substrate W; a plating liquid supply unit 53 configured to supply a plating liquid M1 to the substrate W; and a solvent supply unit 55a configured to supply a solvent N1 having a different temperature from a temperature of the plating liquid M1 to the substrate W. The solvent N1 is supplied to a preset position on the substrate W from the solvent supply unit 55a after the plating liquid M1 is supplied to the substrate W from the plating liquid supply unit 53.
Public/Granted literature
- US20170292192A1 PLATING APPARATUS, PLATING METHOD, AND RECORDING MEDIUM Public/Granted day:2017-10-12
Information query
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