Invention Grant
- Patent Title: Differentiated voltage threshold metal gate structures for advanced integrated circuit structure fabrication
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Application No.: US15859355Application Date: 2017-12-30
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Publication No.: US10741669B2Publication Date: 2020-08-11
- Inventor: Jeffrey S. Leib , Jenny Hu , Anindya Dasgupta , Michael L. Hattendorf , Christopher P. Auth
- Applicant: Intel Corporation
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Agency: Schwabe, Williamson & Wyatt P.C.
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H01L29/78 ; H01L27/088 ; H01L21/762 ; H01L29/06 ; H01L21/8234 ; H01L21/768 ; H01L23/522 ; H01L23/532 ; H01L29/165 ; H01L29/417 ; H01L21/033 ; H01L21/28 ; H01L21/285 ; H01L21/308 ; H01L21/311 ; H01L21/8238 ; H01L23/528 ; H01L27/092 ; H01L27/11 ; H01L49/02 ; H01L29/08 ; H01L29/51 ; H01L27/02 ; H01L21/02 ; H01L29/167 ; H01L23/00

Abstract:
Embodiments of the disclosure are in the field of advanced integrated circuit structure fabrication and, in particular, 10 nanometer node and smaller integrated circuit structure fabrication and the resulting structures. In an example, an integrated circuit structure includes a fin. A gate dielectric layer is over a top of the fin and laterally adjacent sidewalls of the fin. An N-type gate electrode is over the gate dielectric layer over the top of the fin and laterally adjacent the sidewalls of the fin, the N-type gate electrode comprising a P-type metal layer on the gate dielectric layer, and an N-type metal layer on the P-type metal layer. A first N-type source or drain region is adjacent a first side of the gate electrode. A second N-type source or drain region is adjacent a second side of the gate electrode, the second side opposite the first side.
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