Invention Grant
- Patent Title: Liquid supply unit, substrate treating apparatus, and method for removing bubbles
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Application No.: US15856197Application Date: 2017-12-28
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Publication No.: US10758875B2Publication Date: 2020-09-01
- Inventor: Byungsun Bang , Jin Tack Yu , Youngjun Choi , Jonghan Kim , Young Jin Jang
- Applicant: SEMES CO., LTD.
- Applicant Address: KR Chungcheongnam-Do
- Assignee: SEMES CO., LTD.
- Current Assignee: SEMES CO., LTD.
- Current Assignee Address: KR Chungcheongnam-Do
- Agency: Li & Cai Intellectual Property (USA) Office
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@75cff95a com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@d31aaeb
- Main IPC: B01F3/22
- IPC: B01F3/22 ; B08B3/08 ; H01L21/67 ; B01F3/08 ; B08B3/02 ; B08B3/10 ; B05B1/34 ; B01F5/00 ; B05B7/04

Abstract:
Disclosed are an apparatus and a method for liquid-treating a substrate. The substrate treating apparatus includes a liquid supply unit configured to supply a treatment liquid in which a first liquid and a second liquid are mixed, onto the substrate unit, wherein the liquid supply unit includes a nozzle configured to discharge the treatment liquid, a first liquid supply line supplying the first liquid to the nozzle, and a second liquid supply supplying the second liquid to the nozzle, and the nozzle includes a body having a mixing space in which the first liquid and the second liquid are mixed and a buffer space extending from the mixing space, in the interior thereof, and a collision member located in the buffer space and configured to decrease a flow velocity of the treatment liquid supplied to the buffer space.
Public/Granted literature
- US20180185795A1 LIQUID SUPPLY UNIT, SUBSTRATE TREATING APPARATUS, AND METHOD FOR REMOVING BUBBLES Public/Granted day:2018-07-05
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