Invention Grant
- Patent Title: Transistor layout to reduce kink effect
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Application No.: US16661108Application Date: 2019-10-23
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Publication No.: US10971590B2Publication Date: 2021-04-06
- Inventor: Meng-Han Lin , Te-Hsin Chiu , Wei Cheng Wu
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Eschweiler & Potashnik, LLC
- Main IPC: H01L29/00
- IPC: H01L29/00 ; H01L29/423 ; H01L29/10 ; H01L29/78 ; H01L29/08 ; H01L29/66 ; H01L21/762 ; H01L29/06 ; H01L21/28

Abstract:
The present disclosure, in some embodiments, relates to an integrated chip. The integrated chip includes a substrate having interior surfaces that define a trench within an upper surface of the substrate. One or more dielectric materials are disposed within the trench. A source region disposed within the substrate and a drain region is disposed within of the substrate and separated from the source region along a first direction. A gate structure is over the upper surface of the substrate between the source region and the drain region. The upper surface of the substrate has a first width directly below the gate structure that is larger than a second width of the upper surface of the substrate within the source region or the drain region. The first width and the second width are measured along a second direction that is perpendicular to the first direction.
Public/Granted literature
- US20200058749A1 TRANSISTOR LAYOUT TO REDUCE KINK EFFECT Public/Granted day:2020-02-20
Information query
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