Invention Grant
- Patent Title: Intercalated metal/dielectric structure for nonvolatile memory devices
-
Application No.: US16412810Application Date: 2019-05-15
-
Publication No.: US10971684B2Publication Date: 2021-04-06
- Inventor: Mauricio Manfrini , Chung-Te Lin , Gerben Doornbos , Marcus Johannes Henricus van Dal
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Eschweiler & Potashnik, LLC
- Main IPC: H01L47/00
- IPC: H01L47/00 ; H01L45/00 ; H01L27/24 ; G11C13/00

Abstract:
Some embodiments relate to an integrated chip including a memory device. The memory device includes a bottom electrode disposed over a semiconductor substrate. An upper electrode is disposed over the bottom electrode. An intercalated metal/dielectric structure is sandwiched between the bottom electrode and the upper electrode. The intercalated metal/dielectric structure comprises a lower dielectric layer over the bottom electrode, an upper dielectric layer over the lower dielectric layer, and a first metal layer separating the upper dielectric layer from the lower dielectric layer.
Information query
IPC分类: