Invention Grant
- Patent Title: Metal gate modulation to improve kink effect
-
Application No.: US16887138Application Date: 2020-05-29
-
Publication No.: US10998315B2Publication Date: 2021-05-04
- Inventor: Meng-Han Lin , Te-Hsin Chiu , Wei Cheng Wu
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Eschweiler & Potashnik, LLC
- Main IPC: H01L29/00
- IPC: H01L29/00 ; H01L27/092 ; H01L29/49 ; H01L29/423 ; H01L29/78 ; H01L21/8238 ; H01L29/66 ; H01L21/28 ; H01L21/762 ; H01L29/40 ; H01L29/51

Abstract:
The present disclosure relates to an integrated chip. The integrated chip includes a source region and a drain region disposed within an upper surface of a substrate. One or more dielectric materials are disposed within a trench within the substrate. The trench surrounds the source region and the drain region. A gate structure is disposed over the substrate between the source region and the drain region. The gate structure includes a first gate metal having a first sidewall and a second gate metal having a first outer sidewall that contacts the first sidewall directly over the upper surface of the substrate.
Public/Granted literature
- US20200295001A1 METAL GATE MODULATION TO IMPROVE KINK EFFECT Public/Granted day:2020-09-17
Information query
IPC分类: