Invention Grant
- Patent Title: Three-dimensional inverse flat NAND memory device containing partially discrete charge storage elements and methods of making the same
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Application No.: US16020505Application Date: 2018-06-27
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Publication No.: US10998331B2Publication Date: 2021-05-04
- Inventor: Fei Zhou , Yingda Dong , Raghuveer S. Makala
- Applicant: SANDISK TECHNOLOGIES LLC
- Applicant Address: US TX Addison
- Assignee: SANDISK TECHNOLOGIES LLC
- Current Assignee: SANDISK TECHNOLOGIES LLC
- Current Assignee Address: US TX Addison
- Agency: The Marbury Law Group PLLC
- Main IPC: H01L27/11582
- IPC: H01L27/11582 ; H01L27/1157 ; H01L27/11565 ; H01L21/311 ; H01L21/28

Abstract:
A three-dimensional memory device includes alternating stacks of insulating strips and electrically conductive strips located over a substrate and laterally spaced apart among one another by line trenches. The line trenches laterally extend along a first horizontal direction and are spaced apart along a second horizontal direction. Each line trench fill structure includes a laterally undulating dielectric rail having a laterally undulating width along the second horizontal direction and extending along the first horizontal direction and a row of memory stack structures located at neck regions of the laterally undulating dielectric rail. Each memory stack structure includes a vertical semiconductor channel, a blocking dielectric contacting an outer sidewall of the vertical semiconductor channel, and a charge storage layer contacting an outer sidewall of the blocking dielectric, vertically extending continuously through each level of the electrically conductive strips, and having a vertically undulating lateral thickness.
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Information query
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