- 专利标题: Magnetoresistive random access memory and method for fabricating the same
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申请号: US16531108申请日: 2019-08-04
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公开(公告)号: US11004897B2公开(公告)日: 2021-05-11
- 发明人: Kun-Ju Li , Tai-Cheng Hou , Hsin-Jung Liu , Fu-Yu Tsai , Bin-Siang Tsai , Chau-Chung Hou , Yu-Lung Shih , Ang Chan , Chih-Yueh Li , Chun-Tsen Lu
- 申请人: UNITED MICROELECTRONICS CORP.
- 申请人地址: TW Hsin-Chu
- 专利权人: UNITED MICROELECTRONICS CORP.
- 当前专利权人: UNITED MICROELECTRONICS CORP.
- 当前专利权人地址: TW Hsin-Chu
- 代理商 Winston Hsu
- 优先权: TW108123743 20190705
- 主分类号: H01L29/82
- IPC分类号: H01L29/82 ; H01L27/22 ; H01L43/12 ; H01F41/34 ; G11C11/16 ; H01F10/32 ; H01L43/02
摘要:
A method for fabricating semiconductor device includes the steps of: forming a first magnetic tunneling junction (MTJ) and a second MTJ on a substrate; forming a first top electrode on the first MTJ and a second top electrode on the second MTJ; forming a first ultra low-k (ULK) dielectric layer on the first MTJ and the second MTJ; forming a passivation layer on the first ULK dielectric layer, wherein a bottom surface of the passivation layer between the first MTJ and the second MTJ is lower than a top surface of the first MTJ; and forming a second ULK dielectric layer on the passivation layer.
公开/授权文献
- US20210005662A1 SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING THE SAME 公开/授权日:2021-01-07
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