Invention Grant
- Patent Title: Nanometer sized structures grown by pulsed laser deposition
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Application No.: US14439655Application Date: 2013-10-29
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Publication No.: US11004990B2Publication Date: 2021-05-11
- Inventor: Basma El Zein , Yingbang Yao , Elhadje Dogheche , Samir Boulfrad , Ghassan Jabbour
- Applicant: KING ABDULLAH UNIVERSITY OF SCIENCE AND TECHNOLOGY
- Applicant Address: SA Thuwal
- Assignee: KING ABDULLAH UNIVERSITY OF SCIENCE AND TECHNOLOGY
- Current Assignee: KING ABDULLAH UNIVERSITY OF SCIENCE AND TECHNOLOGY
- Current Assignee Address: SA Thuwal
- Agency: Patent Portfolio Builders PLLC
- International Application: PCT/IB2013/003096 WO 20131029
- International Announcement: WO2014/072829 WO 20140515
- Main IPC: B82Y40/00
- IPC: B82Y40/00 ; C30B29/16 ; C23C14/08 ; C23C14/28 ; C30B23/02 ; C30B23/06 ; C23C14/02 ; C30B29/60 ; C01G9/02 ; B82Y20/00 ; B82Y30/00 ; H01L31/0296 ; H01L31/18 ; H01L31/0352
Abstract:
Nanometer sized materials can be produced by exposing a target to a laser source to remove material from the target and deposit the removed material onto a surface of a substrate to grow a thin film in a vacuum chamber.
Public/Granted literature
- US20150280017A1 NANOMETER SIZED STRUCTURES GROWN BY PULSED LASER DEPOSITION Public/Granted day:2015-10-01
Information query
