公开(公告)号：US11004990B2

公开(公告)日：2021-05-11

申请号：US14439655

申请日：2013-10-29

Applicant: KING ABDULLAH UNIVERSITY OF SCIENCE AND TECHNOLOGY

Inventor： Basma El Zein ,  Yingbang Yao ,  Elhadje Dogheche ,  Samir Boulfrad ,  Ghassan Jabbour

IPC: B82Y40/00 ,  C30B29/16 ,  C23C14/08 ,  C23C14/28 ,  C30B23/02 ,  C30B23/06 ,  C23C14/02 ,  C30B29/60 ,  C01G9/02 ,  B82Y20/00 ,  B82Y30/00 ,  H01L31/0296 ,  H01L31/18 ,  H01L31/0352

Abstract: Nanometer sized materials can be produced by exposing a target to a laser source to remove material from the target and deposit the removed material onto a surface of a substrate to grow a thin film in a vacuum chamber.

公开(公告)号：US20150280017A1

公开(公告)日：2015-10-01

申请号：US14439655

申请日：2013-10-29

Applicant: KING ABDULLAH UNIVERSITY OF SCIENCE AND TECHNOLOGY

Inventor： Basma El Zein ,  Yingbang Yao ,  Elhadje Dogheche ,  Samir Boulfrad ,  Ghassan Jabbour

IPC: H01L31/0296 ,  C01G9/02 ,  H01L31/18

CPC classification number: H01L31/0296 ,  B82Y20/00 ,  B82Y30/00 ,  B82Y40/00 ,  C01G9/02 ,  C23C14/024 ,  C23C14/086 ,  C23C14/28 ,  C30B23/02 ,  C30B23/06 ,  C30B29/16 ,  C30B29/60 ,  H01L31/1836 ,  Y10S977/762 ,  Y10S977/811 ,  Y10S977/832 ,  Y10S977/891 ,  Y10S977/948 ,  Y10S977/95 ,  Y10T428/249921

Abstract: Nanometer sized materials can be produced by exposing a target to a laser source to remove material from the target and deposit the removed material onto a surface of a substrate to grow a thin film in a vacuum chamber

Abstract translation: 可以通过将靶暴露于激光源以从靶中除去材料并将去除的材料沉积到衬底的表面上以在真空室中生长薄膜来生产纳米尺寸的材料

公开(公告)号：US20130323434A1

公开(公告)日：2013-12-05

申请号：US13903698

申请日：2013-05-28

Applicant: KING ABDULLAH UNIVERSITY OF SCIENCE AND TECHNOLOGY

Inventor： Samir Boulfrad ,  Erkki Alarousu ,  Eman Husni Da'as ,  Ghassan Jabbour

IPC: B41J3/28 ,  H01B13/00

CPC classification number: B41J3/28 ,  H01B13/0026 ,  H01L31/022425 ,  H01L31/18 ,  H01M4/8832 ,  H01M4/8882

Abstract: Patterned multilayer films, such as those used in electronic devices, solar cells, solid oxide fuel cells (SOFCs), and solid oxide electrolysis cells (SOECs) may be deposited and annealed in a single tool. The tool includes an inkjet printer head, a heater, and a laser. The inkjet printer head deposits on a substrate either suspended particles of a functional material or solvated precursors of a functional material. The head is mounted on a support that allows the head to scan the substrate by moving along the support in a first direction and moving the support along a second direction. After the head deposits the material the heater evaporates solvent from substrate, and the depositing and heating may be repeated one or more times to form a patterned multilayer material. Then, a laser, microwave, and/or Joule effect heating device may be used to anneal the multilayer material to a desired pattern and crystalline state.

Abstract translation: 可以在单个工具中沉积和退火图案化的多层膜，例如用于电子器件，太阳能电池，固体氧化物燃料电池（SOFC）和固体氧化物电解电池（SOEC）中的那些。 该工具包括喷墨打印机头，加热器和激光器。 喷墨打印头在基材上沉积功能材料的悬浮颗粒或功能材料的溶剂化前体。 头部安装在支撑件上，该支撑件允许头部沿第一方向沿着支撑件移动并沿着第二方向移动支撑件来扫描基板。 在头部沉积材料之后，加热器从基底蒸发溶剂，并且沉积和加热可以重复一次或多次以形成图案化的多层材料。 然后，可以使用激光，微波和/或焦耳效应加热装置将多层材料退火到期望的图案和结晶状态。