公开(公告)号：US20150280017A1

公开(公告)日：2015-10-01

申请号：US14439655

申请日：2013-10-29

Applicant: KING ABDULLAH UNIVERSITY OF SCIENCE AND TECHNOLOGY

Inventor： Basma El Zein ,  Yingbang Yao ,  Elhadje Dogheche ,  Samir Boulfrad ,  Ghassan Jabbour

IPC: H01L31/0296 ,  C01G9/02 ,  H01L31/18

CPC classification number: H01L31/0296 ,  B82Y20/00 ,  B82Y30/00 ,  B82Y40/00 ,  C01G9/02 ,  C23C14/024 ,  C23C14/086 ,  C23C14/28 ,  C30B23/02 ,  C30B23/06 ,  C30B29/16 ,  C30B29/60 ,  H01L31/1836 ,  Y10S977/762 ,  Y10S977/811 ,  Y10S977/832 ,  Y10S977/891 ,  Y10S977/948 ,  Y10S977/95 ,  Y10T428/249921

Abstract: Nanometer sized materials can be produced by exposing a target to a laser source to remove material from the target and deposit the removed material onto a surface of a substrate to grow a thin film in a vacuum chamber

Abstract translation: 可以通过将靶暴露于激光源以从靶中除去材料并将去除的材料沉积到衬底的表面上以在真空室中生长薄膜来生产纳米尺寸的材料

公开(公告)号：US11004990B2

公开(公告)日：2021-05-11

申请号：US14439655

申请日：2013-10-29

Applicant: KING ABDULLAH UNIVERSITY OF SCIENCE AND TECHNOLOGY

Inventor： Basma El Zein ,  Yingbang Yao ,  Elhadje Dogheche ,  Samir Boulfrad ,  Ghassan Jabbour

IPC: B82Y40/00 ,  C30B29/16 ,  C23C14/08 ,  C23C14/28 ,  C30B23/02 ,  C30B23/06 ,  C23C14/02 ,  C30B29/60 ,  C01G9/02 ,  B82Y20/00 ,  B82Y30/00 ,  H01L31/0296 ,  H01L31/18 ,  H01L31/0352

Abstract: Nanometer sized materials can be produced by exposing a target to a laser source to remove material from the target and deposit the removed material onto a surface of a substrate to grow a thin film in a vacuum chamber.