Invention Grant
- Patent Title: High density MIM capacitor structure
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Application No.: US16365904Application Date: 2019-03-27
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Publication No.: US11139367B2Publication Date: 2021-10-05
- Inventor: Seiji Takahashi , Chen-Jong Wang , Dun-Nian Yaung , Jung-I Lin , Jhy-Jyi Sze , Alexander Kalnitsky , Yimin Huang , King Liao , Shen-Hui Hong
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Eschweiler & Potashnik, LLC
- Main IPC: H01L49/02
- IPC: H01L49/02 ; H01L21/768

Abstract:
The present disclosure, in some embodiments, relates to an integrated chip. The integrated chip includes a dielectric structure disposed over a substrate. A plurality of conductive interconnect layers are disposed within the dielectric structure. The plurality of conductive interconnect layers include alternating layers of interconnect wires and interconnect vias. A metal-insulating-metal (MIM) capacitor is arranged within the dielectric structure. The MIM capacitor has a lower conductive electrode separated from an upper conductive electrode by a capacitor dielectric structure. The MIM capacitor vertically extends past two or more of the plurality of conductive interconnect layers.
Information query
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