Invention Grant
- Patent Title: Semiconductor device and method for manufacturing semiconductor device
-
Application No.: US16643453Application Date: 2018-08-24
-
Publication No.: US11152513B2Publication Date: 2021-10-19
- Inventor: Shunpei Yamazaki , Yoshinobu Asami , Takahisa Ishiyama , Motomu Kurata , Ryo Tokumaru , Noritaka Ishihara , Yusuke Nonaka
- Applicant: SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
- Applicant Address: JP Atsugi
- Assignee: SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
- Current Assignee: SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
- Current Assignee Address: JP Atsugi
- Agency: Fish & Richardson P.C.
- Priority: JPJP2017-170017 20170905,JPJP2017-170018 20170905,JPJP2017-237526 20171212,JPJP2018-027691 20180220,JPJP2018-027723 20180220
- International Application: PCT/IB2018/056414 WO 20180824
- International Announcement: WO2019/048968 WO 20190314
- Main IPC: H01L29/786
- IPC: H01L29/786 ; H01L29/22 ; H01L29/66

Abstract:
A semiconductor device with favorable reliability is provided. The semiconductor device includes a first insulator; a second insulator positioned over the first insulator; an oxide positioned over the second insulator; a first conductor and a second conductor positioned apart from each other over the oxide; a third insulator positioned over the oxide, the first conductor, and the second conductor; a third conductor positioned over the third insulator and at least partly overlapping with a region between the first conductor and the second conductor; a fourth insulator positioned to cover the oxide, the first conductor, the second conductor, the third insulator, and the third conductor; a fifth insulator positioned over the fourth insulator; and a sixth insulator positioned over the fifth insulator. An opening reaching the second insulator is formed in at least part of the fourth insulator; the fifth insulator is in contact with the second insulator through the opening; and the first insulator, the fourth insulator, and the sixth insulator have a lower oxygen permeability than the second insulator.
Public/Granted literature
- US20210126130A1 SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE Public/Granted day:2021-04-29
Information query
IPC分类: