- 专利标题: Memory device and method for fabricating the same
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申请号: US16728394申请日: 2019-12-27
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公开(公告)号: US11211401B2公开(公告)日: 2021-12-28
- 发明人: Yao-An Chung , Yuan-Chieh Chiu , Ting-Feng Liao , Kuang-Wen Liu , Kuang-Chao Chen
- 申请人: MACRONIX International Co., Ltd.
- 申请人地址: TW Hsinchu
- 专利权人: MACRONIX International Co., Ltd.
- 当前专利权人: MACRONIX International Co., Ltd.
- 当前专利权人地址: TW Hsinchu
- 代理机构: J.C. Patents
- 主分类号: H01L27/115
- IPC分类号: H01L27/115 ; H01L27/11582 ; H01L23/48 ; H01L29/51 ; H01L21/02 ; H01L21/768 ; H01L21/28 ; H01L21/311
摘要:
A memory device includes a substrate. A first dielectric layer is disposed over the substrate. A plurality of conductive layers and a plurality of dielectric layers are alternately and horizontally disposed on the substrate. A channel column structure is disposed on the substrate and in the conductive layers and the dielectric layers. A side wall of the channel column structure is in contact with the plurality of conductive layers. A second dielectric layer covers the first dielectric layer. A conductive column structure is in the first and second dielectric layers, adjacent to the channel column structure, and in contact with one of the plurality of conductive layers. The conductive column structure includes a liner insulating layer as a shell layer.
公开/授权文献
- US20210202518A1 MEMORY DEVICE AND METHOD FOR FABRICATING THE SAME 公开/授权日:2021-07-01
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