Invention Grant
- Patent Title: Circular grating structure for photonic device
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Application No.: US16863989Application Date: 2020-04-30
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Publication No.: US11227958B2Publication Date: 2022-01-18
- Inventor: Tao-Cheng Liu , Tsai-Hao Hung , Ying-Hsun Chen
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsinchu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: Seed IP Law Group LLP
- Main IPC: H01L31/18
- IPC: H01L31/18 ; H01L31/0232 ; H01L31/0352 ; H01L31/054 ; H01L31/02 ; H01L31/04

Abstract:
An integrated circuit includes a photodetector. The photodetector includes a circular optical grating formed in an annular trench in a semiconductor substrate. The circular optical grating includes dielectric fins and photosensitive fins positioned in the annular trench. The circular optical grating is configured to receive incident light and to direct the incident light around the annular trench through the dielectric fins and the photosensitive fins until the light is absorbed by one of the photosensitive fins.
Public/Granted literature
- US20210343883A1 CIRCULAR GRATING STRUCTURE FOR PHOTONIC DEVICE Public/Granted day:2021-11-04
Information query
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