Invention Grant
- Patent Title: Contact structures
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Application No.: US16780046Application Date: 2020-02-03
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Publication No.: US11257718B2Publication Date: 2022-02-22
- Inventor: Chanro Park , Stan Tsai
- Applicant: GLOBALFOUNDRIES U.S. INC.
- Applicant Address: US CA Santa Clara
- Assignee: GLOBALFOUNDRIES U.S. INC.
- Current Assignee: GLOBALFOUNDRIES U.S. INC.
- Current Assignee Address: US CA Santa Clara
- Agency: Roberts Calderon Safran & Cole, P.C.
- Agent Francois Pagette; Andrew M. Calderon
- Main IPC: H01L21/8234
- IPC: H01L21/8234 ; H01L21/768 ; H01L21/311 ; H01L21/321 ; H01L27/088 ; H01L29/45 ; H01L29/06 ; H01L21/285 ; H01L29/08 ; H01L29/417 ; H01L29/66

Abstract:
The present disclosure relates to semiconductor structures and, more particularly, to contact structures and methods of manufacture. The method includes: recessing an isolation region between adjacent gate structures and below metallization overburden of source/drain metallization; planarizing the metallization overburden to a level of the adjacent gate structures; and forming source/drain contacts to the source/drain metallization, on sides of and extending above the adjacent gate structures.
Public/Granted literature
- US20200176325A1 CONTACT STRUCTURES Public/Granted day:2020-06-04
Information query
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