Invention Grant
- Patent Title: Magnetic memory element, method for producing same, and magnetic memory
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Application No.: US16996559Application Date: 2020-08-18
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Publication No.: US11258006B2Publication Date: 2022-02-22
- Inventor: Tetsuo Endoh , Masaaki Niwa , Hiroaki Honjo , Hideo Sato , Shoji Ikeda , Toshinari Watanabe
- Applicant: TOHOKU UNIVERSITY
- Applicant Address: JP Miyagi
- Assignee: TOHOKU UNIVERSITY
- Current Assignee: TOHOKU UNIVERSITY
- Current Assignee Address: JP Miyagi
- Agency: Fox Rothschild LLP
- Agent Robert J. Sacco; Carol E. Thorstad-Forsyth
- Priority: JPJP2019-153233 20190823
- Main IPC: H01L43/02
- IPC: H01L43/02 ; H01L27/22 ; H01L43/10 ; H01L43/12 ; G11C11/16

Abstract:
Provided are a magnetic memory element in which an improvement in properties, such as an improvement in coercive properties or a reduction in a leak current, can be attained, a method for producing the same, and a magnetic memory. The magnetic memory element, includes: a columnar stack ST in which a reference layer FX having a fixed magnetization direction, a barrier layer TL including a non-magnetic body, and a recording layer FR having a reversible magnetization direction are stacked in this order; and an insulating film which contains nitrogen and is provided to cover a lateral surface of the columnar stack, in which in one or both of the recording layer and the barrier layer, a nitrogen concentration is 7×1030 atoms/m2 or more in a position of 2 nm inside from an outer circumferential end of the columnar stack.
Public/Granted literature
- US20210091304A1 MAGNETIC MEMORY ELEMENT, METHOD FOR PRODUCING SAME, AND MAGNETIC MEMORY Public/Granted day:2021-03-25
Information query
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