Invention Grant
- Patent Title: High voltage integration for HKMG technology
-
Application No.: US17009879Application Date: 2020-09-02
-
Publication No.: US11302691B2Publication Date: 2022-04-12
- Inventor: Kong-Beng Thei , Chien-Chih Chou , Fu-Jier Fan , Hsiao-Chin Tuan , Yi-Huan Chen , Alexander Kalnitsky , Yi-Sheng Chen
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsinchu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: Eschweiler & Potashnik, LLC
- Main IPC: H01L27/088
- IPC: H01L27/088 ; H01L21/8238 ; H01L29/51 ; H01L27/092 ; H01L27/02 ; H01L27/04 ; H01L21/8234 ; H01L29/66 ; H01L29/423

Abstract:
The present disclosure relates to an integrated circuit (IC) and a method of formation. In some embodiments, a low voltage region and a high voltage region are integrated in a substrate. A low voltage transistor device is disposed in the low voltage region and comprises a low voltage gate electrode and a low voltage gate dielectric separating the low voltage gate electrode from the substrate. A first interlayer dielectric layer is disposed over the substrate surrounding the low voltage gate electrode and the low voltage gate dielectric. A high voltage transistor device is disposed in the high voltage region and comprises a high voltage gate electrode disposed on the first interlayer dielectric layer.
Information query
IPC分类: