Invention Grant
- Patent Title: Package structure and manufacturing method thereof
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Application No.: US16877512Application Date: 2020-05-19
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Publication No.: US11342297B2Publication Date: 2022-05-24
- Inventor: Ming-Fa Chen , Hsien-Wei Chen , Jie Chen , Sen-Bor Jan , Sung-Feng Yeh
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsinchu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: JCIPRNET
- Main IPC: H01L23/544
- IPC: H01L23/544 ; H01L21/78 ; H01L23/00 ; H01L23/31 ; H01L21/56

Abstract:
A package structure including at least one die laterally encapsulate by an encapsulant, a bonding film and an interconnect structure is provided. The bonding film is located on a first side of the encapsulant, and the bonding film includes a first alignment mark structure. The package structure further includes a semiconductor material block located on the bonding film. The interconnect structure is located on a second side of the encapsulant opposite to the first side, and the interconnect structure includes a second alignment mark structure. A location of the first alignment mark structure vertically aligns with a location of the second alignment mark structure.
Public/Granted literature
- US20210098409A1 PACKAGE STRUCTURE AND MANUFACTURING METHOD THEREOF Public/Granted day:2021-04-01
Information query
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