- 专利标题: Variable implant and wafer-level feed-forward for dopant dose optimization
-
申请号: US16944890申请日: 2020-07-31
-
公开(公告)号: US11455452B2公开(公告)日: 2022-09-27
- 发明人: Mahalingam Nandakumar , Murlidhar Bashyam , Alwin Tsao , Douglas Newman
- 申请人: TEXAS INSTRUMENTS INCORPORATED
- 申请人地址: US TX Dallas
- 专利权人: TEXAS INSTRUMENTS INCORPORATED
- 当前专利权人: TEXAS INSTRUMENTS INCORPORATED
- 当前专利权人地址: US TX Dallas
- 代理商 Andrew R. Ralston; Charles A. Brill; Frank D. Cimino
- 主分类号: G06F30/30
- IPC分类号: G06F30/30 ; G06F30/367 ; H01L21/66 ; G06F30/398 ; G06F30/392 ; H01L21/28 ; H01L29/66 ; H01L29/423 ; G06F30/373
摘要:
The present disclosure provides a method for adjusting implant parameter conditions in semiconductor processing by wafer and by wafer zone using in-line measurements from previous operations and a feed-forward computer model. The feed-forward model is based on a sensitivity map of in-line measured data and its effect of electrical performance. Feed-forward computer models that adjust implant parameters by wafer and by zone improve both wafer-to-wafer and within wafer electrical uniformity in semiconductor devices.
公开/授权文献
信息查询